Practically all material changing into nano as long as their grain radius become smaller than Bohr radius. InAs semiconductor having the second large Bohr radius and having also a small band gap which makes us choosing as a material for our study. To deposited nanoInAs spray pyrolysis was adopted since it is cheap and gives the possibility of controlling thin films characteristics. In this work a three principle parameters was studied, the first is spraying time, the second was the substrate temperature and the third was the solution morality in order to determine the best deposition conditions which could be used in making hetrojunction Measurement emerged that the crystal structure of thin films change significantly with change spray parameter on the optical and electric properties ,where describes the X-Ray schemes that all films were multiple crystal and levels of crystalline most frequent and highest intensity levels were(111) and (200) at the diffraction (25.442)°and (29.442)° respectively In addition to this was the expense of some structural characteristics such as grain size, strain, micro strain and the lattice constant. Thickness increased linearly with increasing temperature, while decreasing thickness at temperature higher than 300 C°,as well as thickness increased linear with increasing spray time. Analysis of transmittance and absorbance spectrum, using UV-VIS spectroscope at range(200-1100)nm was to increase thin films impact on those properties where there is no permeability spectral the region of at least 300nm, and then show a sharp increase in permeability and stabilizes after 400nm at temperature 250C° and 270C° and at higher temperature less permeability. Repeated the same results at different times of spraying. As the spectral absorbance it show quantitavely exclusively of energy gap at 300nm wavelength. And repeated the same energies at different spray time. Energy gap was greater than the value in mass situation and decreases with the spray time and temperature of substrate An addition, the increase in temperature deposition led to increased electrical conductivity, as to the results of the adoption of connectivity on the spray time also found that the conductivity increases with spray time.